장비예약현황
측정/평가장비
광학 조립/정렬 측정기
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- 모델명 LAS-UP
- 제작사 Opto Alignment Technology Inc
- 이용금액 100,000원 / 1시간 / VAT포함
- 이용가능시간 00:00 ~ 00:00
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주요사양
- Z-axis travel range : 1,000 mm
- Max. Sample weight : 400 Kg
- Max. Sample diameter : Ø300 mm
- Alignment Accuracy : 2 ㎛
- Centering measurement accuracy : 0.1 ㎛
- Center thickness and air gap measurement accuracy : 2 ㎛
- Air bearing spindle accuracy : 100 nm
- Max. optical sample thickness : 400 mm
- Number of surface : 20 surface or over
- Light Source : Red, Green, Blue, MWIR, LWIR
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주요사양
- Z-axis travel range : 1,000 mm
예약현황
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