Equipment List
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Processing equipment Freeform Optical Part Processing Machine
- Model Nanoform X
- Manufacturer AMETEK Precitech
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Specifications
- Turning performance : surface roughness < 1 nm Ra, Form accuracy < 0.1 micron P-V
- Ultimate load capacity : 136 kg (300 pounds) @ 100 psi
- Swing capacity : Max swing 300 mm diameter
- Programing Resolution : 0.01 nm linear
- Micro-LAM(Laser Assisted Machine)
- Micro Milling : Max. 80,000 RPM
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Processing equipment Ultra Precision CNC tool Grinder
- Model PG4
- Manufacturer COBORN Engineering Co Ltd
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Specifications
- Tool post: +/-20° tilt cylindrical clearance
- Planetary Motion : 0.1° planetary position resolution
- Anti-Bearing Pivot : ‹ 50nm rotational error, Maximum arc of rotation 182°
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Processing equipment High Precision Vertical Machine
- Model S90 Linear
- Manufacturer (주)CORRON
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Specifications
- Travel Range : X 900 mm, Y 900 mm, Z 540 mm
- Table size : 920 X 920 mm
- Table loading capacity : 1,000 kg
- Spindle Speed : 42,000 RPM/E40
- Max. Feedrate : 100 m/min
- Scale Feedback Resolution : 1 nm
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Measuring equipment 3D measuring laser microscope
- Model OLS5000-LAF
- Manufacturer OLYMPUS
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Specifications
- Total magnification : 54x - 17,280x
- Height configuration
· Measurement range : 37 mm
· Display resolution : 0.5 nm
· Repeatability : 100x - 12 nm
· Accuracy : ± 1.5 %
- Width configuration
· Measurement range : 300 X 300 mm
· Resolution : 1 nm
· Repeatability : 100x - 20 nm
· Accuracy : ± 1.5 %
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Measuring equipment MTF Measuring Instrument for Optical system
- Model ImageMaster Universal
- Manufacturer Trioptics
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Specifications
⊙ Measurement of MTF configuration
- Aperture Size : ~ Up to Diameter 300 mm
- Accuracy MTF(Vis) : ±0.02 MTF On-Axis
- Accuracy MTF(IR) : ±0.03 MTF On-Axis
- MTF Repeatability(Vis) : ±0.01 MTF
- MTF Repeatability(IR) : ±0.02 MTF
- MTF off-axis angle up to ±75 deg
- Optical set up : Finite, Infinite or Afocal
⊙ Spectral Range
- UV (250 ~ 400 nm) - Vis (400 ~ 700 nm)
- NIR (700 ~ 1000 nm) - SWIR ( 1~1.5 ㎛)
- MWIR (3~5 ㎛) - LWIR ( 8~13 ㎛)
Further optical parameter
- EFL (Vis) : Accuracy ≤ 0.2% , Repeatability ≤ 0.1%
- EFL (IR) : Accuracy ≤ 0.5% , Repeatability ≤ 0.2%
Seidel 5 Aberration
- Aberration/Distortion/Astigmatism/Field curvature/Coma
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Measuring equipment Ultra precision aspheric measuring instruments
- Model PGI Freeform XL
- Manufacturer Taylor Hobson
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Specifications
- Measurement range for X, Y-axis: 200 mm
- Measurement range for Z-axis : 14 mm(Shot), 28 mm(Long)
- X, Y axis accuracy : ±50 nm
- Z axis accuracy : ±75 nm
- Max. measurement speed : 10 mm/sec
- probe measuring Force : 0.5 ~ 1.2 mN
- Max. measurement angle : 55˚
- Max. loading capacity : 10 kg
- Measurement of surface profile : Flat, Sphere, Asphere, Freeform
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Measuring equipment Non-contact ultra precision shape measuring inst
- Model LuphoScan 420HD
- Manufacturer Taylor Hobson
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Specifications
-Axis configuration : X, Y, Z, C(4-axis)
-Measurement range for X, Y, Z-axis : 420, 420, 100 mm
-Max. sample diameter : Φ420 mm
-Z-axis resolution : 0.1 nm
-X, Y, Z axis accuracy : ±50 nm
-Max. measurement angle : 90˚
-Max. loading capacity : 50 kg
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Measuring equipment UV-Visble-IR Transmittance/Reflectance Tester
- Model Lambda 1050+
- Manufacturer Perkin Elmer
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Specifications
-Max. sample size : 200 X 200 X 200 mm or Ø150 mm
-Wavelength Range : 175 ~ 3,300 nm
-Wavelength accuracy UV-Vis(200 ~ 760 nm) : ± 0.08 nm IR(760 ~ 3,300 nm) : ± 0.3 nm
-Wavelength Resolution UV-Vis(200 ~ 760 nm) : ≤0.05 nm IR(760 ~ 3,300 nm) : ≤0.2 nm
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Measuring equipment IR transmittance tester at variable indident ang
- Model Frontier
- Manufacturer Perkin Elmer
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Specifications
-Max. sample size : 2 inch or Ø50 mm
-Wavelength Range : 8,300 ~ 30 〖cm〗^(-1)
-Wavelength accuracy : 0.02 〖cm〗^(-1)
-Wavelength Resolution : 0.4 〖cm〗^(-1)
-Wavelength Precision : 0.008 〖cm〗^(-1)
S/N ratio : 50,000 : 1 @MIR, 30,000 : 1 @FIR
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Measuring equipment Optical lens module performance tester
- Model NED-LMD E101
- Manufacturer Gamma Scientific
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Specifications
-Measurement area : 16 X 12 degree
-Measurement range of luminance : 0.1 ~ 10,000 nits
-X, Y, Z positioning precision : ±0.02 mm
-View space(H, W, D) : 50 X 250 X 30 mm
-Wavelength range : 360 ~ 940 nm
-Wavelength accuracy : ±0.2 nm
-Spectroradiometer resolution : 0.6 nm
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Measuring equipment Smart aligner Optical Sensor
- Model ProCAM Align Smart
- Manufacturer Trioptics
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Specifications
-Linear alignment resolution :
-Final linear alignment accuracy :
-Tilt alignment resolution :
-Find tilt alignment accuracy :
-Max. sample size : Ø30 mm
-Max. UPH(Units per Hour) : 120
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Measuring equipment 3D Optical surface profile
- Model NPFLEX
- Manufacturer Bruker
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Specifications
- Lateral resolution : 0.069 ㎛ - Max. Sample Height : 259 mm
- Vertical Scan Range : 10.04 mm - Vertical resolution : ≤ 0.1 nm
- Sample stage tilt : ± 4.38˚ - Step height accuracy : 0.037%
- RMS Repeatability : 0.0041 nm
- Camera Pixel : 1.2 MP - Max. Sample loading capacity : 50 kg
- Measurement range reflectivity : 0.1~100%
- Light Source : LED(Green, White)
- Turret : Motorized 5 position
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Measuring equipment Ultra precision final inspection system for lens
- Model LAS-UP
- Manufacturer Opto Alignment Technology Inc
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Specifications
- Z-axis travel range : 1,000 mm
- Max. Sample weight : 400 Kg
- Max. Sample diameter : Ø300 mm
- Alignment Accuracy : 2 ㎛
- Centering measurement accuracy : 0.1 ㎛
- Center thickness and air gap measurement accuracy : 2 ㎛
- Air bearing spindle accuracy : 100 nm
- Max. optical sample thickness : 400 mm
- Number of surface : 20 surface or over
- Light Source : Red, Green, Blue, MWIR, LWIR
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Processing equipment Aspheric Ultra precision CNC Multi axis Hybrid m
- Model 650FG v2
- Manufacturer Moore Nanotechnology Systems
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Specifications
- Linear axis travel range(X,Y,Z) : 350, 150, 300 mm
- Rotation axis travel range(B,C) : Bi-directional infinity 360˚
- Workpiece(C-axis) Max. speed : 10,000 RPM
- Workpiece swing capacity : Ø750 mm
- Workpiece loading capacity : 102 kg
- Workpiece motion accuracy : 15 nm
- Rotary table(B-axis) swing capacity : Ø280 mm
- Rotary table positioning accuracy : ±1.0 arc-sec
- Linear axis Programming resolution : 0.01 nm
- Linear axis position feedback resolution : 0.01 nm
- Rotation axis Programming resolution : 0.000,000,1˚
- Rotation axis position feedback resolution : 0.01 arc-sec
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Processing equipment Ultra precision nano grooving machine
- Model NIC-300PS5-N5
- Manufacturer Nagase Integrex
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Specifications
- Linear Axis(X,Y,Z) : 400×650×180 mm
- Linear axis feedrate(X,Y,Z) : 20,000×20,000×1,000 mm/min
- Rotation Axis(C,A) : Bi-directional Infinity 360˚
- Rotation Axis speed(C,A) : 10RPM
- Table Diameter : 350 mm
- Table loading capacity : 300kg
- Programming resolution : 1nm - Scale feedback resolution : 0.1nm
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Measuring equipment Optical lens module Tester for Infrared
- Model Imagemaster HR MAX
- Manufacturer Trioptics
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Specifications
- Optical set-up : Infinite conjugates (finite optional)
- Max. off-axis angle : Up to ±70˚
- Spectral range : NUV~NIR (or 300~2,500 nm)
- Max. image height : ±23 mm
- Clear aperture : up to 100 mm
- EFL range of the sample : 1~200mm
- Max. spatial frequency : ~1,000 lp/mm
- Accuracy : ±0.02 MTF(or 2%)
- Repeatability : ± 0.005 MTF (or 0.5%)
- Parameters to be measured : MTF in infinity conjugate configuration/
MTF on-axis, MTF off-axis or offaxis/EFL/FFL(relative)/Distortion/Astigmatism/
Field curvature/Chromatic aberrations/CRA
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